Nickel Superalloys FeCl₃+HCl

Chemical Etching Formula
Hastelloy X with FeCl₃+HCl

This reference describes how Hastelloy X responds to the FeCl₃+HCl etching formula. At a bath temperature of 54°C and concentration of 46 °Bé, the recipe holds an etch factor of about 2.45 and a typical production yield of 95.0%. It is intended as engineering reference data for design, sourcing, and process planning.

Formula Summary

The table below summarizes every parameter that defines this etching formula. Values listed as ranges scale with sheet thickness across the supported band.

FeCl₃+HCl Etchant System
46 °Bé Concentration
1.430 Specific Gravity
54 °C Bath Temperature
Through etch (double-sided) Etch Depth Type
0.05-0.3 mm Thickness Range
0.15 mm Typical Thickness
0.12-2.06 m/min Conveyor Speed Range
0.36 m/min Typical Speed
60-360 μm Min Hole Ø Range
100-300 μm Min Line Width Range
10-61 μm Undercut Range
2.45 Etch Factor (EF)
95.0% Typical Yield (94.6-95.3%)

Why FeCl₃+HCl for Hastelloy X?

On Hastelloy X, the ferric chloride system attacks the alloy's oxide layer continuously while ferric ions drive dissolution. It is regenerable, compatible with standard photolithography, and produces clean burr-free edges — which is why nearly every Hastelloy X etch line runs a variant of this formula.

Process Window & Bath Control

Hold the bath at 54°C with concentration 46 °Bé (specific gravity 1.430). Across the 0.05-0.3 mm thickness range, conveyor speed runs from 0.12-2.06 m/min — thinner sheets move faster, thicker sheets slower, in roughly inverse proportion to thickness. A typical mid-range setpoint is 0.36 m/min for 0.15 mm stock. Use redundant PID temperature control to hold the bath within ±1.5°C, and titrate at least once per shift.

Design Rules & Tolerances

When laying out artwork for Hastelloy X at through etch (double-sided), plan for a minimum hole diameter in the 60-360 μm range and a minimum line width in the 100-300 μm range, depending on the chosen sheet thickness within 0.05-0.3 mm. The etch factor of ~2.45 and undercut range of 10-61 μm determine how much the mask must be biased to land the finished dimension on target.

Design Rule Summary
• Minimum hole diameter range: 60-360 μm
• Minimum line width range: 100-300 μm
• Single-side undercut range: 10-61 μm
• Typical etch factor (EF): 2.45

Yield & Production Economics

Typical mass-production yield for Hastelloy X in the FeCl₃+HCl system is 95.0%, within an observed range of 94.6-95.3%. The dominant yield-loss modes are photoresist pinhole defects and rinse-water contamination. Improving incoming sheet quality and photoresist coating consistency gives the highest yield-improvement leverage for this formula.

Typical Applications

Typical applications for Hastelloy X processed with FeCl₃+HCl include turbine-engine seals, high-temperature gaskets, and aerospace fluidic plates. The formula's tolerance band and yield make it well suited to medium-to-high-volume precision flat parts.

More Nickel Superalloys Formulas

Other formulas in the same material family.

Frequently Asked Questions

Spent FeCl₃+HCl bath contains dissolved Hastelloy X ions and depleted oxidizer. Standard practice is chemical or electrolytic regeneration to recover activity, plus periodic decanting of metal-rich sludge for off-site recovery. Treatment to neutral pH with metals precipitation is the minimum before any discharge, and requirements vary by jurisdiction.

Need a Quote for This Process?

WET Etched runs production wet chemical etching lines using the FeCl₃+HCl chemistry. Send us your part drawing and quantity for a full process quote.