Precision Alloys FeCl₃+HCl

Chemical Etching Formula
HyMu80 (Permalloy) with FeCl₃+HCl

This page documents the reference wet chemical etching formula for HyMu80 (Permalloy) using the FeCl₃+HCl system. The recipe below covers a sheet-thickness range of 0.05-0.2 mm and is configured for through etch (double-sided). Every value is drawn from operational process records rather than theoretical calculation, and is provided as a starting point for your own process development.

Formula Summary

The table below summarizes every parameter that defines this etching formula. Values listed as ranges scale with sheet thickness across the supported band.

FeCl₃+HCl Etchant System
44 °Bé Concentration
1.410 Specific Gravity
50 °C Bath Temperature
Through etch (double-sided) Etch Depth Type
0.05-0.2 mm Thickness Range
0.10 mm Typical Thickness
0.34-2.69 m/min Conveyor Speed Range
0.95 m/min Typical Speed
60-240 μm Min Hole Ø Range
100-200 μm Min Line Width Range
9-36 μm Undercut Range
2.75 Etch Factor (EF)
96.7% Typical Yield (96.4-96.8%)

Why FeCl₃+HCl for HyMu80 (Permalloy)?

Ferric-chloride-based formulas are the industrial workhorse for ferrous, nickel, and copper-bearing alloys like HyMu80 (Permalloy). The Fe³⁺ ion oxidizes the metal surface; where HCl is present it regenerates dissolved species and stabilizes chloride concentration. The result on HyMu80 (Permalloy) is anisotropic etching with predictable undercut and an easily regenerated spent bath.

Process Window & Bath Control

The process window for this FeCl₃+HCl formula centres on 50°C and 44 °Bé. Conveyor speed spans 0.34-2.69 m/min over the 0.05-0.2 mm thickness band; the typical operating point is 0.95 m/min. Every 5°C drop in bath temperature requires roughly a 30% reduction in conveyor speed to hold the same etch depth, so temperature stability is the single biggest lever on consistency.

Design Rules & Tolerances

Design rules for this recipe: hole diameter 60-240 μm, line width 100-200 μm, single-side undercut 9-36 μm — all as a function of thickness across 0.05-0.2 mm. The higher the etch factor (this formula holds about 2.75), the tighter the achievable tolerance. Below the minimum feature sizes, yield falls off steeply, so treat those numbers as hard floors rather than targets.

Design Rule Summary
• Minimum hole diameter range: 60-240 μm
• Minimum line width range: 100-200 μm
• Single-side undercut range: 9-36 μm
• Typical etch factor (EF): 2.75

Yield & Production Economics

Expect a yield in the 96.4-96.8% range for HyMu80 (Permalloy) with FeCl₃+HCl, with 96.7% typical on a well-controlled line. Most rejects trace back to upstream coating and exposure rather than to the etch bath itself, so tightening photolithography control is usually the fastest path to a higher number.

Typical Applications

HyMu80 (Permalloy) etched with this recipe typically ends up in hermetic sealing rings, lead frames matched to glass/ceramic, and magnetic shielding. Because chemical etching applies no mechanical or thermal load, the finished features are free of work-hardening and heat-affected zones — a decisive advantage over stamping or laser cutting for these uses.

More Precision Alloys Formulas

Other formulas in the same material family.

Frequently Asked Questions

The recommended working concentration for HyMu80 (Permalloy) in the FeCl₃+HCl system is 44 °Bé, corresponding to a specific gravity of about 1.410. Titrate the bath at least once per shift and correct back toward this setpoint; drift below it signals depletion, while drift above usually means evaporative water loss.

Need a Quote for This Process?

WET Etched runs production wet chemical etching lines using the FeCl₃+HCl chemistry. Send us your part drawing and quantity for a full process quote.